Nano-metrology; Accuracy of interferometric measurements
Dr. Han Haitjema
Mitutoyo - The Netherlands
This tutorial will deal nanometrology and especially how interferometric measurements play a role in this.
First, general concepts of interferometry will be treated including the techniques for obtainint nanometer-accuracy. Then various implementations of this technique in displacement interferometry and related error sources will be dealt with.
Also surface metrology will be treated including the various techniques employed for obtaining nanometer resolutions and accuracy.
Calibration, and traceability issues in the nanometer region will be extensively treated for these technologies and they will be combined in the issue of accurate gauge block calibration.
Information about the speaker
Han Haitjema was born and brought up in The Netherlands. He obtained his MSc in Physics at the Utrecht University in 1985. He obtained his PhD at the Delft University of Technology in 1989, then he joined the NMi Van Swinden Laboratory, the National Measurement Institute of The Netherlands. In 1997 he moved to the Eindhoven University of Technology in Delft as assistant professor, and joined the Precision Engineering group of Prof. Schellekens. In 2004 he joined Mitutoyo as the director of Mitutoyo Research Center Europe in Best, The Netherlands.
His research interests cover all aspects of dimensional metrology. During almost two decades of research work, he has published many technical papers in domestic and international journals and regularly presented his work in international conferences. During his stay at the Eindhoven University he guided six students towards their PhD in precision dimensional metrology. He is chairman of the Dutch standardization committee for product geometry, corresponding member of CIRP (The International Academy for Production Engineering) and vice chairman CIRP technical committee “S” (surfaces).