Piezoresistive 3D microprobes for CMM applications – design and working principle

True three dimensional (3D) measurements of micro and nano structures are becoming crucial tasks following the continuous miniaturization in mechanical and optical production. To realize an ultra high precision micro/nano-coordinate measuring machine (CMM), the development of tactile probes is a vital task. In detail the design and working principle of various 3D microprobes developed and realized at PTB will be described

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